Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Hong Shih, Jie Yuan, Diana Xiaobing Ma | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Hong Shih, Jie Yuan, Diana Xiaobing Ma | 2003-11-04 |