Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Senh Thach, Shun Wu, Yixing Lin, Clifford Stow | 2003-12-09 |
| 6571464 | Self-standing spacer wall structures and methods of fabricating and installing same | Theodore S. Fahlen, Alfred S. Conte, Robert M. Duboc, Jr., George B. Hopple, John K. O'Reilly +7 more | 2003-06-03 |
| 6508911 | Diamond coated parts in a plasma reactor | Nianci Han, Hong Shih, Li Xu | 2003-01-21 |