Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Jennifer Y. Sun, Shun Wu, Yixing Lin, Clifford Stow | 2003-12-09 |
| 6572814 | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas | Shamouil Shamoulian, Arnold Kholodenko, Wing Cheng | 2003-06-03 |