Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Senh Thach, Jennifer Y. Sun, Shun Wu, Yixing Lin | 2003-12-09 |
| 6656535 | Method of fabricating a coated process chamber component | Yongxiang He, Hong Wang | 2003-12-02 |
| 6565984 | Clean aluminum alloy for semiconductor processing equipment | Shun Wu, Hong Wang, Yixing Lin | 2003-05-20 |