Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656535 | Method of fabricating a coated process chamber component | Yongxiang He, Clifford Stow | 2003-12-02 |
| 6565984 | Clean aluminum alloy for semiconductor processing equipment | Shun Wu, Clifford Stow, Yixing Lin | 2003-05-20 |