Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Senh Thach, Jennifer Y. Sun, Shun Wu, Clifford Stow | 2003-12-09 |
| 6565984 | Clean aluminum alloy for semiconductor processing equipment | Shun Wu, Clifford Stow, Hong Wang | 2003-05-20 |