Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583980 | Substrate support tolerant to thermal expansion stresses | You Wang, Arnold Kholodenko, Shamouil Shamouilian, Alexander Veytser | 2003-06-24 |
| 6572814 | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas | Shamouil Shamoulian, Arnold Kholodenko, Senh Thach | 2003-06-03 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Alexander Veytser | 2003-01-07 |