Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Gilbert Hausmann, Zheng Xu | 2003-04-15 |
| 6535372 | Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same | Chandra Deshpandey | 2003-03-18 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser | 2003-01-07 |