Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Vijay D. Parkhe, Zheng Xu | 2003-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Vijay D. Parkhe, Zheng Xu | 2003-04-15 |