Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589890 | Precleaning process for metal plug that minimizes damage to low-&kgr; dielectric | Suraj Rengarajan, Kenny King-Tai Ngan | 2003-07-08 |
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Gilbert Hausmann, Vijay D. Parkhe, Zheng Xu | 2003-04-15 |