Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589890 | Precleaning process for metal plug that minimizes damage to low-&kgr; dielectric | Barney M. Cohen, Kenny King-Tai Ngan | 2003-07-08 |
| 6579730 | Monitoring process for oxide removal | Haojiang Li, Peijun Ding | 2003-06-17 |