Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625003 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | David H. Loo, Jr-Jyan Chen, Bradley O. Stimson | 2003-09-23 |
| 6589890 | Precleaning process for metal plug that minimizes damage to low-&kgr; dielectric | Barney M. Cohen, Suraj Rengarajan | 2003-07-08 |