Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625003 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Jr-Jyan Chen, Kenny King-Tai Ngan, Bradley O. Stimson | 2003-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625003 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Jr-Jyan Chen, Kenny King-Tai Ngan, Bradley O. Stimson | 2003-09-23 |