Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625003 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | David H. Loo, Jr-Jyan Chen, Kenny King-Tai Ngan | 2003-09-23 |
| 6554979 | Method and apparatus for bias deposition in a modulating electric field | — | 2003-04-29 |