Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660134 | Feedthrough overlap coil | Praburam Gopalraja, Michael Rosenstein, John C. Forster | 2003-12-09 |
| 6610184 | Magnet array in conjunction with rotating magnetron for plasma sputtering | Peijun Ding, Rong Tao | 2003-08-26 |
| 6599399 | Sputtering method to generate ionized metal plasma using electron beams and magnetic field | Seshadri Ramaswami | 2003-07-29 |
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Gilbert Hausmann, Vijay D. Parkhe | 2003-04-15 |
| 6514390 | Method to eliminate coil sputtering in an ICP source | Fusen Chen, Jaim Nulman | 2003-02-04 |