Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669829 | Shutter disk and blade alignment sensor | Michael Feltsman, Allen Lau, Marc Schweitzer | 2003-12-30 |
| 6660134 | Feedthrough overlap coil | Praburam Gopalraja, Zheng Xu, John C. Forster | 2003-12-09 |
| 6589407 | Aluminum deposition shield | Anantha K. Subramani, Ashok Das, Leif DeLaurentis | 2003-07-08 |