Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669829 | Shutter disk and blade alignment sensor | Michael Feltsman, Allen Lau, Michael Rosenstein | 2003-12-30 |
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Yoichiro Tanaka, Alan Liu, ANTHONY CHAN +2 more | 2003-09-16 |