Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, Alan Liu, ANTHONY CHAN +2 more | 2003-09-16 |