Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660134 | Feedthrough overlap coil | Praburam Gopalraja, Zheng Xu, Michael Rosenstein | 2003-12-09 |
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, Alan Liu +2 more | 2003-09-16 |
| 6579426 | Use of variable impedance to control coil sputter distribution | James Van Gogh | 2003-06-17 |
| 6565717 | Apparatus for sputtering ionized material in a medium to high density plasma | David M. Leet | 2003-05-20 |