Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627056 | Method and apparatus for ionized plasma deposition | Wei Wang | 2003-09-30 |
| 6579426 | Use of variable impedance to control coil sputter distribution | John C. Forster | 2003-06-17 |