Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627542 | Continuous, non-agglomerated adhesion of a seed layer to a barrier layer | Srinivas Gandikota, Rong Tao, Liang-Yuh Chen | 2003-09-30 |
| 6599399 | Sputtering method to generate ionized metal plasma using electron beams and magnetic field | Zheng Xu | 2003-07-29 |
| 6521107 | Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life | Murali Abburi | 2003-02-18 |