Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627542 | Continuous, non-agglomerated adhesion of a seed layer to a barrier layer | Srinivas Gandikota, Liang-Yuh Chen, Seshadri Ramaswami | 2003-09-30 |
| 6610184 | Magnet array in conjunction with rotating magnetron for plasma sputtering | Peijun Ding, Zheng Xu | 2003-08-26 |