Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654698 | Systems and methods for calibrating integrated inspection tools | — | 2003-11-25 |
| 6608495 | Eddy-optic sensor for object inspection | Moshe Sarfaty, Ramaswamy Sreenivasan | 2003-08-19 |
| 6583509 | Semiconductor processing techniques | — | 2003-06-24 |
| 6572321 | Loader conveyor for substrate processing system | — | 2003-06-03 |
| 6514390 | Method to eliminate coil sputtering in an ICP source | Zheng Xu, Fusen Chen | 2003-02-04 |
| 6506009 | Apparatus for storing and moving a cassette | Nissim Sidi | 2003-01-14 |