Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633391 | Monitoring of film characteristics during plasma-based semi-conductor processing using optical emission spectroscopy | Hakeem Oluseyi | 2003-10-14 |
| 6627463 | Situ measurement of film nitridation using optical emission spectroscopy | — | 2003-09-30 |
| 6608495 | Eddy-optic sensor for object inspection | Ramaswamy Sreenivasan, Jaim Nulman | 2003-08-19 |
| 6603538 | Method and apparatus employing optical emission spectroscopy to detect a fault in process conditions of a semiconductor processing system | Hakeem Oluseyi | 2003-08-05 |
| 6589869 | Film thickness control using spectral interferometry | Lalitha Balasubramhanya, Jed Davidow, Dimitris Lymberopoulos | 2003-07-08 |
| 6521080 | Method and apparatus for monitoring a process by employing principal component analysis | Lalitha Balasubramhanya, Jed Davidow, Dimitris Lymberopoulos | 2003-02-18 |