Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589869 | Film thickness control using spectral interferometry | Moshe Sarfaty, Jed Davidow, Dimitris Lymberopoulos | 2003-07-08 |
| 6521080 | Method and apparatus for monitoring a process by employing principal component analysis | Moshe Sarfaty, Jed Davidow, Dimitris Lymberopoulos | 2003-02-18 |