Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625513 | Run-to-run control over semiconductor processing tool based upon mirror image target | Terry Reiss, Arulkumar Shanmugasundram | 2003-09-23 |
| 6589869 | Film thickness control using spectral interferometry | Moshe Sarfaty, Lalitha Balasubramhanya, Jed Davidow | 2003-07-08 |
| 6521080 | Method and apparatus for monitoring a process by employing principal component analysis | Lalitha Balasubramhanya, Moshe Sarfaty, Jed Davidow | 2003-02-18 |