Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633391 | Monitoring of film characteristics during plasma-based semi-conductor processing using optical emission spectroscopy | Moshe Sarfaty | 2003-10-14 |
| 6603538 | Method and apparatus employing optical emission spectroscopy to detect a fault in process conditions of a semiconductor processing system | Moshe Sarfaty | 2003-08-05 |
| 6579806 | Method of etching tungsten or tungsten nitride in semiconductor structures | Padmapani Nallan | 2003-06-17 |