Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583980 | Substrate support tolerant to thermal expansion stresses | You Wang, Arnold Kholodenko, Shamouil Shamouilian, Wing Cheng | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Wing Cheng | 2003-01-07 |