Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581275 | Fabricating an electrostatic chuck having plasma resistant gas conduits | Shamouil Shamouilian, Dennis S. Grimard | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |