Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639783 | Multi-layer ceramic electrostatic chuck with integrated channel | Shamouil Shamouilian, Ananda H. Kumar | 2003-10-28 |
| 6583980 | Substrate support tolerant to thermal expansion stresses | Arnold Kholodenko, Shamouil Shamouilian, Alexander Veytser, Wing Cheng | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, Wing Cheng, Alexander Veytser | 2003-01-07 |