Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639783 | Multi-layer ceramic electrostatic chuck with integrated channel | Shamouil Shamouilian, You Wang | 2003-10-28 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2003-07-01 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |