Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Shiang-Bau Wang, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +3 more | 2003-11-25 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2003-07-01 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Eric Askarinam, Craig A. Roderick | 2003-02-04 |