Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Hiroji Hanawa, John Trow, David Stover, Fernando Silveira | 2003-10-21 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6589437 | Active species control with time-modulated plasma | — | 2003-07-08 |
| 6572732 | Parallel-plate electrode plasma reactor having an inductive antenna coupling power through a parallel plate electrode | — | 2003-06-03 |
| 6551446 | Externally excited torroidal plasma source with a gas distribution plate | Hiroji Hanawa, Yan Ye, Kartik Ramaswamy, Andrew Nguyen, Tsutomu Tanaka | 2003-04-22 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +6 more | 2003-04-08 |
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Hoiman Hung, Joseph P. Caulfield, Hongchin Shan, Chunshi Cui, Michael R. Rice | 2003-04-08 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick, David W. Groechel +7 more | 2003-02-11 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Michael R. Rice, Eric Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2003-02-04 |