Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Hoiman Hung, Joseph P. Caulfield, Kenneth S. Collins, Chunshi Cui, Michael R. Rice | 2003-04-08 |