Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602434 | Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window | Joseph P. Caulfield, Hongqing Shan, Ruiping Wang, Gerald Yin | 2003-08-05 |
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Joseph P. Caulfield, Hongchin Shan, Kenneth S. Collins, Chunshi Cui, Michael R. Rice | 2003-04-08 |