Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Martin R. Elliott, Chris Pencis, Jeffrey C. Hudgens | 2003-06-24 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Timothy Weidman, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2003-06-03 |
| 6556887 | Method for determining a position of a robot | Marvin L. Freeman, Jeffrey C. Hudgens, Damon K. Cox, Chris Pencis, David A. Van Gogh | 2003-04-29 |
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Hoiman Hung, Joseph P. Caulfield, Hongchin Shan, Kenneth S. Collins, Chunshi Cui | 2003-04-08 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Eric Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2003-02-04 |