Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Joe Feng, Meiyee Shek, Suketu Arun Parikh, Linh Thanh | 2003-12-02 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Timothy Weidman, Ian Latchford, Christopher Dennis Bencher +1 more | 2003-06-03 |