Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Christopher S. Ngai, Meiyee Shek, Suketu Arun Parikh, Linh Thanh | 2003-12-02 |
| 6635583 | Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating | Christopher Dennis Bencher, Mei-Yee Shek, Chris Ngai, Judy H. Huang | 2003-10-21 |
| 6562544 | Method and apparatus for improving accuracy in photolithographic processing of substrates | David Cheung, Judy H. Huang, Wai-Fan Yau | 2003-05-13 |