Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2003-12-30 |
| 6635583 | Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating | Christopher Dennis Bencher, Joe Feng, Mei-Yee Shek, Chris Ngai | 2003-10-21 |
| 6562544 | Method and apparatus for improving accuracy in photolithographic processing of substrates | David Cheung, Joe Feng, Wai-Fan Yau | 2003-05-13 |
| 6541369 | Method and apparatus for reducing fixed charges in a semiconductor device | Chris Bencher, Sudha Rathi | 2003-04-01 |
| 6533855 | Dispersions of silicalite and zeolite nanoparticles in nonpolar solvents | Justin Gaynor | 2003-03-18 |
| 6517913 | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions | David Cheung, Sebastien Raoux, William Taylor, Mark Fodor, Kevin Fairbairn | 2003-02-11 |