Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517913 | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions | David Cheung, Sebastien Raoux, Judy H. Huang, William Taylor, Kevin Fairbairn | 2003-02-11 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen, Kelly Fong +1 more | 2003-01-14 |