Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6539621 | Safety guard for an RF connector | Richard R. Mett, Mark W. Curry | 2003-04-01 |
| 6517913 | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions | David Cheung, Sebastien Raoux, Judy H. Huang, Mark Fodor, Kevin Fairbairn | 2003-02-11 |