Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517913 | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions | David Cheung, Judy H. Huang, William Taylor, Mark Fodor, Kevin Fairbairn | 2003-02-11 |