Issued Patents 2003
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, Wai-Fan Yau, Kuowei Liu +7 more | 2003-12-30 |
| 6660663 | Computer readable medium for holding a program for performing plasma-assisted CVD of low dielectric constant films formed from organosilane compounds | Wai-Fan Yau, Robert R. Mandal | 2003-12-09 |
| 6660656 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-12-09 |
| 6632735 | Method of depositing low dielectric constant carbon doped silicon oxide | Wai-Fan Yau, Ju-Hyung Lee, Nasreen Chopra, Tzu-Fang Huang, Farhad Moghadam +5 more | 2003-10-14 |
| 6596655 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-07-22 |
| 6593247 | Method of depositing low k films using an oxidizing plasma | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2003-07-15 |
| 6562690 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-05-13 |
| 6562544 | Method and apparatus for improving accuracy in photolithographic processing of substrates | Joe Feng, Judy H. Huang, Wai-Fan Yau | 2003-05-13 |
| 6541282 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-04-01 |
| 6537929 | CVD plasma assisted low dielectric constant films | Wai-Fan Yau, Robert R. Mandal | 2003-03-25 |
| 6517913 | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions | Sebastien Raoux, Judy H. Huang, William Taylor, Mark Fodor, Kevin Fairbairn | 2003-02-11 |
| 6511903 | Method of depositing a low k dielectric with organo silane | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2003-01-28 |
| 6511909 | Method of depositing a low K dielectric with organo silane | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2003-01-28 |