Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-12-09 |
| 6645878 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 2003-11-11 |
| 6627532 | Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition | Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more | 2003-09-30 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-07-22 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-05-13 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-04-01 |
| 6511903 | Method of depositing a low k dielectric with organo silane | Wai-Fan Yau, David Cheung, Kuowei Liu, Yung-Cheng Yu | 2003-01-28 |
| 6511909 | Method of depositing a low K dielectric with organo silane | Wai-Fan Yau, David Cheung, Kuowei Liu, Yung-Cheng Yu | 2003-01-28 |