Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-12-09 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-07-22 |
| 6596627 | Very low dielectric constant plasma-enhanced CVD films | — | 2003-07-22 |
| 6592980 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more | 2003-07-15 |
| 6576568 | Ionic additives for extreme low dielectric constant chemical formulations | Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2003-06-10 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-05-13 |
| 6559070 | Mesoporous silica films with mobile ion gettering and accelerated processing | — | 2003-05-06 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-04-01 |
| 6541367 | Very low dielectric constant plasma-enhanced CVD films | — | 2003-04-01 |