Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660662 | Method of reducing plasma charge damage for plasma processes | Tetsuya Ishikawa, Seon-Mee Cho, Feng Gao, Kaveh Niazi, Michio Aruga | 2003-12-09 |
| 6592980 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Nikolaos Bekiaris +3 more | 2003-07-15 |
| 6576568 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2003-06-10 |