Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660662 | Method of reducing plasma charge damage for plasma processes | Tetsuya Ishikawa, Alexandros T. Demos, Seon-Mee Cho, Feng Gao, Kaveh Niazi | 2003-12-09 |
| 6632726 | Film formation method and film formation apparatus | Atsushi Tabata | 2003-10-14 |