Issued Patents 2003
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667527 | Temperature sensor with shell | Brian Lue, Liang Wang | 2003-12-23 |
| 6660662 | Method of reducing plasma charge damage for plasma processes | Alexandros T. Demos, Seon-Mee Cho, Feng Gao, Kaveh Niazi, Michio Aruga | 2003-12-09 |
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-12-09 |
| 6656286 | Pedestal with a thermally controlled platen | Thomas Cho | 2003-12-02 |
| 6639962 | Preventive maintenance method and apparatus of a structural member in a reactor pressure vessel | Kunio Enomoto, Katsuhiko Hirano, Eisaku Hayashi, Ren Morinaka, Sadato Shimizu +2 more | 2003-10-28 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Walter Zygmunt | 2003-07-22 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-07-22 |
| 6589610 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Alan W. Collins | 2003-07-08 |
| 6572708 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Lily Pang, Michael P. Karazim | 2003-06-03 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-05-13 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +6 more | 2003-04-08 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-04-01 |
| 6523563 | Modular gas panel closet for a semiconductor wafer processing platform | Thomas Cho, Robert Navasca | 2003-02-25 |
| 6519991 | Water jet peening apparatus | Katsuhiko Hirano, Kunio Enomoto, Eisaku Hayashi, Sadato Shimizu, Ren Morinaka +2 more | 2003-02-18 |
| 6517634 | Chemical vapor deposition chamber lid assembly | Lily Pang, Thomas Cho | 2003-02-11 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2003-02-11 |
| 6511153 | Preliminary discharge acceptor mechanism and printing apparatus provided with the preliminary discharge acceptor mechanism | — | 2003-01-28 |