Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656286 | Pedestal with a thermally controlled platen | Tetsuya Ishikawa | 2003-12-02 |
| 6572708 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Lily Pang, Michael P. Karazim, Tetsuya Ishikawa | 2003-06-03 |
| 6523563 | Modular gas panel closet for a semiconductor wafer processing platform | Robert Navasca, Tetsuya Ishikawa | 2003-02-25 |
| 6517634 | Chemical vapor deposition chamber lid assembly | Lily Pang, Tetsuya Ishikawa | 2003-02-11 |