Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572708 | Semiconductor wafer support lift-pin assembly | Rudolf Gujer, Thomas Cho, Michael P. Karazim, Tetsuya Ishikawa | 2003-06-03 |
| 6517634 | Chemical vapor deposition chamber lid assembly | Thomas Cho, Tetsuya Ishikawa | 2003-02-11 |